8 companies for Nitrogen Trifluoride ✓ B2B manufacturers, distributors & suppliers from 4 countries ✓ With special service for fast information and prices ✓
- Nitrogen Trifluoride(NF₃) - Nitrogen Trifluoride(NF3) Gas
Nitrogen Trifluoride plays a pivotal role in semiconductor manufacturing and various other industrial applications. Nitrogen Trifluoride is utilized in the plasma-enhanced chemical vapor deposition (PECVD) process within semiconductor fabrication. It is instrumental in cleaning and depositing films critical for high-performance electronic components. In photolithography processes, Nitrogen Trifluoride serves as a fluorinating agent, aiding in precise pattern creation, crucial for microfabrication and chip manufacturing.
Molecular weight: 71.002
Boiling point: -129.05 at 1.013 bar [℃] / -200.29 at 14.5 psi, [℉]
Density: 3.015 at 1.013bar, 15℃, [kg/m3] / 0.184 at 1 atm., 70 ℉, [lb/ft3]
Flammability range in air, [% volume]: Non combustible
Specific volume: 0.332 at 1.013bar, 15℃, [m3/kg] / 5.43 at 1 atm., 70 ℉, [ft3/lb]
1. Nitrogen trifluoride is used as a high speed, selective etchant in silicon processing. It has been used to etch silicon, polysilicon, silicon nitride and silicon oxide as well as refractory metals and silicides.
2. Nitrogen trifluoride is sometimes used as the fluorine source in HF /DF chemical lasers. Nitrogen trifluoride is used as a fluorinating agent. Nitrogen trifluoride is also used for fibre treatment.
AGC Chemicals Europe, Ltd.
Manufacturer ✓ Supplier ✓ Service provider ✓- Nitrogen Trifluoride
- Nitrogen Trifluoride
AIR LIQUIDE Deutschland GmbH
Manufacturer ✓ Trader ✓- Pressure Gases
Frunze
Manufacturer ✓ Trader ✓ Supplier ✓ Service provider ✓- Pressure Gases
KRAISS & FRIZ e.K. Autogenwerk
Manufacturer ✓ Trader ✓ Supplier ✓ Service provider ✓- Pressure Gases
- Pressure Gases
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