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Quantitative residual gas analysis - measuring the degree of cleaning of vacuum components
Quantitative residual gas analysis provides information about the suitability of a component or material for use in a vacuum. The efficiency of different cleaning processes can be compared and the pump system can be optimally dimensioned. REUTER TECHNOLOGIE has been using quantitative residual gas analysis using mass spectrometry for many years in the development of its own assemblies and components. Take advantage of our know-how and many years of experience to investigate the outgassing behavior of your components. We determine the outgassing rate in the unit mbar∙l∙s-1∙cm-2, so that the values are scalable to any surface.
Our services in the quantitative residual gas analysis:
- Quantitative residual gas analysis of components (determination of the outgassing elements and their rate in mbar∙l∙s-1∙cm-2)
- Measurement report including detail spectra (optional, samples on request)
- Test certificate (optional, if specification is available, Lower Detection Limits (LDL) are taken into account)
- Suitability testing of components that have already been qualified in air (e.g. sensors) for use in vacuum Determination of the outgassing behaviour of materials under vacuum conditions
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- Applications in the semiconductor industry
- Applications in the beverage and beer production
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- Residual Gas Analysis | Gas Analysis | Gas Analysis Devices
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