سنسورهای کانفوکال  تولیدکنندگان، عرضه‌کنندگان، توزیع‌کنندگان

FRT is one of the world's leading suppliers of 3D metrology for R&D and mass production. The FRT MicroProf® is established in the semiconductor front-end, advanced packaging, MEMS, VCSEL, automotive, mechanical engineering, optics, LED and medical markets.
A third-generation ultra-stable platform and proprietary software are the result of more than 25 years of experience. The FRT multisensor concept and hybrid measurement technology support production lines worldwide. The applications are non-contact and fully automatic. Measurement parameters are topography, step height, roughness, TTV, curvature, warpage, tension, layer and stack thickness, overlay and CD - and many more.
Different measuring methods can be combined with point, line and area sensors as well as layer thickness sensors and atomic force microscopes in one measuring device and recipe.
The multi-award-winning measuring systems provide (also fully automatically) information on topography, structure, step height, roughness, wear, layer thickness and many other parameters, non-contact and non-destructive.
Depending on the application, different measuring methods with point, line, area and layer thickness sensors as well as atomic force microscopy can be combined in one measuring device - the measuring ranges can extend from the metre to the sub-nanometre range.